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scia Systems GmbH

Обновления и архивы

www.scia-systems.com;
SEMICON RUSSIA 2016 (M)
scia Systems GmbH
Германия
09125, Chemnitz, Annaberger Stra.e 240
info@scia-systems.com
www.scia-systems.com
scia Systems manufactures ion beam
and plasma processing equipment
for deposition, etching, trimming and
structuring of thin films and surfaces.
The modular systems are used for the
production of microelectronics and
MEMS, in both high volume production
as well as in research and development
environments. Several vacuum process
chambers can be combined into cluster
or in-line solutions.

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