www.svcs.eu;
SEMIEXPO RUSSIA 2017 (л)
SVCS PROCESS INNOVATION
Чехия 63700, Brno, Optatova 37 Teл.: +420-541-423-230 Факс: +420-541-423-219
info@svcs.cz
www.svcs.eu
SVCS Process Innovation is a manufacturer of batch horizontal and vertical furnaces that are used in the semiconductor industry or R&D institutes, as well as for making solar cells. Other SVCS products include various gas source systems like gas cabinets, valve manifold boxes and custom-made gas systems for delivery of the ultra-high purity technical gases. Furthermore, various precursors delivery systems that brings liquids to the process in the form of vapor - typical examples are TMA DCS, TCS, TEOS etc. SVCS also offers turnkey hook-up services including orbital welding and installation materials - valves, fittings, tubing, pressure regulators, filters etc. from world leading manufacturers.