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SEMICON RUSSIA 2016 (M)

SVCS Process Innovation s.r.o

CZ-637 00, , Optatova 37
info@svcs.eu
www.svcs.cz
Manufacturer of batch horizontal
furnaces for semiconductor and PV
industries. Supported processes for
PV industry include POCl3 and BBr3
diffusion, batch PE CVD passivation (AR
coating) and both wet and dry oxidation.
Gas source systems for ammonia, silane,
nitrogen, oxygen and many other high
purity gases. Our installations are in
major russian semiconductor companies
and R&D institutes

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